We design and manufacture a wide range of high purity components and process equipment for the semiconductor industry - all tailor-made to meet our customers’ needs.
Keep chemical purity under ppb levels
We can keep the impurities below 150 ppt with respect to metal and ionic contamination. We use high purity PFA or PTFE for piping, valves and pumps, flared couplings. We ensure minimal dead spaces to reduce interference with high-purity chemicals to a minimum.
Chemical and heat resistance
Plastic materials are selected to meet high purity requirements as well as chemical and heat resistance. PFA, PTFE, ECTFE, FEP, PVDF, PP, POM, PEEK, and C-PVC are most commonly used, however, to meet specific safety standards we also work with FM4910 approved materials.
Our product range for the semiconductor industry includes but is not limited to:
Wafer etching equipment; handling and inspection tools:
- Wafer tweezers and handlers
- Wafer cassettes
- Wafer trays
- Cassette inserts
Process equipment:
- Chemical Distribution Units (CDU)
- Slurry Distribution Units (SDU)
- Wet benches for acid and caustic etching or cleaning processes
- Wet benches for solvent processes
- Chemical waste collection and handling equipment
- Quick dump rinse baths
- Laminar flow cabinets
- Chemical mixing and pumping stations
- Chemical blending equipment
Machine Parts:
- Turntables
- N2 wet blanketing with bubblers
- Process tanks with heating, cooling, recirculation, and filtering
- Ultrasonic cleaning
- Mix tanks and vessels
- Rinse baths
- Quick dump rinse baths
- Valve manifolds
- Sensor housings
- Drum connectors and dip tubes